212510 Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems
212510 Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems
Tuesday, March 15, 2011: 3:30 PM
Water Tower (Hyatt Regency Chicago)
We report the design, fabrication, and testing of an electrostatically actuated microvalve made exclusively with soft-lithographic techniques that can be utilized to route pressure to pneumatic actuators on portable chemical microsystems.
See more of this Session: Industry Needs and Goals for University Research
See more of this Group/Topical: Topical 5: University Research for Industry
See more of this Group/Topical: Topical 5: University Research for Industry