212510 Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems

Tuesday, March 15, 2011: 3:30 PM
Water Tower (Hyatt Regency Chicago)
Joshua D. Tice1, Amit V. Desai1, Thomas A. Bassett2, Christopher A. Apblett3 and Paul J. A. Kenis4, (1)Department of Chemical & Biomolecular Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, (2)Chemical & Biomolecular Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, (3)Sandia National Laboratories, Albuquerque, NM, (4)Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign, Urbana, IL

We report the design, fabrication, and testing of an electrostatically actuated microvalve made exclusively with soft-lithographic techniques that can be utilized to route pressure to pneumatic actuators on portable chemical microsystems.

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