We present a new method in analysing the compaction of microscopic agglomerates formed by ballistic hit-and-stick deposition. This induced agglomeration results – material dependent – in structures with very high porosity. While deforming these structures both, the applied force as well as the structure deformations are detected and recorded. The force is applied by so called colloidal probe technique (atomic force microscopy). The reaction of the sample is observed by scanning electron microscopy. The combination of these two approaches offers the opportunity of deeper analysing the mechanical properties of agglomerates build of particles in the micrometer range.