473010 Process Control for Atmospheric Pressure Plasma Systems

Sunday, November 13, 2016: 4:02 PM
Golden Gate 5 (Hilton San Francisco Union Square)
Brandon S. Curtis, Chemical and Biomolecular Engineering, UC Berkeley, Berkeley, CA

Atmospheric pressure plasma systems show significant promise in materials processing and medical applications, but challenges remain in device instrumentation and characterization, real-time process control, and dosage quantification. We discuss the design and implementation of a fully-automated atmospheric pressure plasma testbed for rapidly screening device designs and evaluating thermal, electrical, optical, and chemical instrumentation schemes and process control strategies.

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See more of this Session: Plasma and Electrochemical Deposition Techniques
See more of this Group/Topical: Materials Engineering and Sciences Division