469105 Development of New Chemistries for Molecular Layer Deposition
Here our search for new linking chemistries compatible with the solid-gas phase nature of MLD will be presented. Our effort can be divided into three very different reaction types. Firstly, we have examined nucleophilic substitutions of alkyl iodides with different nucleophilic precursors, to e.g. enable controlled growth of nanoscale polyethylenimine. This reaction type is so far unexplored for MLD, but it is similar in nature to the nucleophilic acyl substation which is the most common MLD linking chemistry. The second reaction type is the pericyclic Diels Alder reaction. This reaction creates new carbon-carbon bonds without the need for a catalyst, and it is therefore a powerful addendum to the existing toolbox of MLD chemistries. The third reaction class is photo-activated MLD, in which the direct input of energy from UV-light is utilized to overcome otherwise infeasible reaction barriers. Photo-activated MLD may also result in new carbon-carbon bond forming reactions. We will present our successful and unsuccessful results pertaining to these new classes of MLD chemistries, including XPS, ellipsometry and IR analysis of the nanoscale polymer thin films. Additionally, the challenges we have encountered with each of these new chemistries will be discussed.