454911 Gray-Box Modeling of 300mm Czochralski Single-Crystal Si Production Process
In this research, a statistical model is embedded into the first-principle model proposed by Zheng et al. (2015) to further improve the model accuracy, since a first-principle model of .the dynamics of the meniscus height is difficult to build. The statistical model is used for estimating a key parameter in the nonlinear first-principle model, which significantly affects the meniscus height. Moving window partial least squares (MWPLS) is used to develop the statistical model since it can cope with the time-varying characteristics of CZ process, which originate from changes in the crystal length and the crucible position. The developed gray-box model was applied to a 300 mm CZ single-crystal silicon production process. It was confirmed that the accuracy of the developed model was much better than the model proposed by Zheng et al. (2015).
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