28 Plasma Science and Gas Phase Deposition Techniques
28 Plasma Science and Gas Phase Deposition Techniques
Sunday, November 16, 2014: 3:30 PM
A706 (Marriott Marquis Atlanta)
Description:
This session will examine recent advances in the fundamental study and application of plasma processes and gas phase deposition techniques, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), and related approaches. Both experimental and theoretical contributions to this session are encouraged.
Sponsor:
Electronics and Photonics
Chair:
Co-Chair:

See more of this Group/Topical: Materials Engineering and Sciences Division