383681 Preparation of Amorphous Carbon Molecular Sieve Membranes Via Plasma-Enhanced Chemical Vapor Deposition

Friday, November 21, 2014: 9:35 AM
302 (Hilton Atlanta)
Hiroki Nagasawa, Masakoto Kanezashi, Tomohisa Yoshioka and Toshinori Tsuru, Department of Chemical Engineering, Hiroshima University, Higashi-Hiroshima, Japan

Amorphous carbon membranes were fabricated on porous ceramic substrates by means of plasma-enhanced chemical vapor deposition (PECVD) using propane as the carbon precursor. The gas permeation measurement revealed that PECVD-derived amorphous carbon membranes possessed molecular sieving properties. Although the amorphous carbon layer was deposited at room temperature, the membrane showed a good thermal stability.

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See more of this Session: Carbon Based Nano-Structured Membranes
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