Preparation of Amorphous Carbon Molecular Sieve Membranes Via Plasma-Enhanced Chemical Vapor Deposition

Amorphous carbon membranes were fabricated on porous ceramic substrates by means of plasma-enhanced chemical vapor deposition (PECVD) using propane as the carbon precursor. The gas permeation measurement revealed that PECVD-derived amorphous carbon membranes possessed molecular sieving properties. Although the amorphous carbon layer was deposited at room temperature, the membrane showed a good thermal stability.