368255 The Role of Time-Scale Analysis in Simulation of ALD and CVD Surface Reaction Kinetics

Tuesday, November 18, 2014: 9:10 AM
401 - 402 (Hilton Atlanta)
Elizabeth Remmers, Curtisha D. Travis, David Arana-Chavez and Raymond A. Adomaitis, Department of Chemical & Biomolecular Engineering; Institute for Systems Research, University of Maryland, College Park, MD


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