368255 The Role of Time-Scale Analysis in Simulation of ALD and CVD Surface Reaction Kinetics
368255 The Role of Time-Scale Analysis in Simulation of ALD and CVD Surface Reaction Kinetics
Tuesday, November 18, 2014: 9:10 AM
401 - 402 (Hilton Atlanta)
See more of this Session: Advances in Computational Methods and Numerical Analysis
See more of this Group/Topical: Computing and Systems Technology Division
See more of this Group/Topical: Computing and Systems Technology Division