Synthesis and Integration of Multifunctional Oxide Materials

The demand of engineering metal oxide thin films at an atomic level has grown immensely due to their versatile applications in numerous technologically advanced fields including microelectronics, optoelectronics, photonics, spintronics, energy storage devices and sensors. In this talk, I will discuss current research advances in atomic layer deposition for synthesizing complex and multifunction metal oxides with tailored electronic, chemical, interfacial, thermal properties and microstructures. Specifically, I will highlight our most recent research on the engineering of oxide thin films and their patterning, and discuss the challenges and opportunities for their applications in high speed electronics, optoelectronics and energy storage devices.