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Semiconductor Surface Chemistry

Monday, November 9, 2009: 3:15 PM
Hermitage B (Gaylord Opryland Hotel)

Description:
This session will focus on the characterization, analysis, modeling, and utilization of semiconducting surfaces.


Sponsor:
Low Pressure
Co-Sponsor(s):
Electronics and Photonics (08e)


Chair:
Katherine S. Ziemer
Email: k.ziemer@neu.edu

Co-Chair:
Edmund Seebauer
Email: eseebauer@illinois.edu


3:15 PM
(168a) Particle Adhesion in Microelectronics Processing
Caitlin Kilroy and Stephen P. Beaudoin

3:40 PM
(168b) RHEED-TRAXS Development for Real Time, in-Situ Stoichiometry Analysis During Thin Film Deposition
Bing Sun, Zhuhua Cai, Martina List and Katherine S. Ziemer

4:05 PM
(168c) Defect Engineering for Ultra-Shallow Junctions Using Solid-Solid Interfaces
Prashun Gorai, Yevgeniy Kondratenko and Edmund Seebauer

4:30 PM
(168d) Chemical Mechanisms of Interface Degradation Between Barium Hexaferrite Thin Films On Wide Bandgap 6H-SiC
Zhuhua Cai, Trevor L. Goodrich, Zhaohui Chen, Bing Sun, Vince Harris and Katherine S. Ziemer
See more of this Group/Topical: Engineering Sciences and Fundamentals