Monday, November 9, 2009: 12:30 PM
Magnolia Boardroom B (Gaylord Opryland Hotel)
Description:
This session calls for papers related to gas-phase deposition of thin films, including but not limited to physical vapor deposition, chemical vapor deposition, molecular beam epitaxy, and atomic layer deposition.
Sponsor:
Electronics and Photonics
Chair:
Co-Chair:
12:55 PM
1:20 PM
(92c)
Chemical Vapor Deposition of WNxCy for Diffusion Barrier Application Using a Tungsten Diphenylhydrazido Complex
2:10 PM
(92e)
Chemical Vapor Deposition Reactor Design for Copper Oxide Films Used in Photoelectrochemical Hydrogen Production Applications
See more of this Group/Topical: Materials Engineering and Sciences Division