Gas-Phase Deposition of Thin Films

Monday, November 9, 2009: 12:30 PM
Magnolia Boardroom B (Gaylord Opryland Hotel)

Description:
This session calls for papers related to gas-phase deposition of thin films, including but not limited to physical vapor deposition, chemical vapor deposition, molecular beam epitaxy, and atomic layer deposition.


Sponsor:
Electronics and Photonics


Chair:
John G. Ekerdt
Email: ekerdt@che.utexas.edu

Co-Chair:
W. Robert Ashurst
Email: ashurwr@eng.auburn.edu


12:30 PM
(92a) GaAs Integration On High-Quality Ge On Si for Multijunction Solar Cells
Darin Leonhardt, Josephine Sheng, Jeffrey Cederberg, Malcolm Carroll and Sang M. Han

1:20 PM
(92c) Chemical Vapor Deposition of WNxCy for Diffusion Barrier Application Using a Tungsten Diphenylhydrazido Complex
Dojun Kim, Oh Hyun Kim, Tim Anderson, Jürgen Koller, Lisa McElwee-White, Lii-Cherng Leu and David P. Norton

2:35 PM
(92f) Dispersed Nanoelectrodes Devices
Antonio Tricoli and Sotiris E. Pratsinis
See more of this Group/Topical: Materials Engineering and Sciences Division