A Novel Fabrication Method for Producing Arrays of Nanopore Devices for Biomolecule Analysis

Nanopore-based single-molecule analysis of biomolecules such as DNA and proteins is a subject of strong scientific and technological interest. In this work, a novel fabrication procedure using traditional microelectronics tools is developed to produce arrays of finely tunable nanopores in free-standing silicon nitride across a wafer. The process couples the high resolution and scalability of electron beam lithography and atomic layer deposition. This overcomes the limitations of other methods used to produce pores, such as transmission electron beam (scalability, lack of automation) and focused ion beam (reproducibility). Once nanopores of order 10 nm or less are achieved, DNA translocation will be tested in individual devices using optimized electrical stimuli, with the goal of approaching ultra-rapid high resolution size separation of strands.