Monday, November 17, 2008: 3:15 PM-5:45 PM
Franklin 8 (Marriott Philadelphia Downtown)
Electronics and Photonics (08e)
#183 - Topics in Plasma Science and Thin Film Applications III - in Honor of Herbert H. Sawin (08E00)
Topics In Plasma Science and Thin Film Applications III - In Honor of Herbert H. Sawin
Chair:	Jane P. Chang
CoChair:	Sumit Agarwal
3:15 PM	183a		Plasma Etching for Metal Gate Electrode Fabrication in Conventional and Sub-Threshold Transistor Integration Steven A. Vitale, Jakub Kedzierski, Nisha Checka, Craig L. Keast
3:45 PM	183b		Interface Preparation for High Mobility Substrates Anthony J. Muscat
4:15 PM	183c		Applying Lessons Learned from An Etching Lab: The Role of O Atoms In PECVD Colin A. Wolden
4:45 PM	183d		Polymer Nano-Texturing and Stochastic Nano-Patterning Using Plasma Processing Evangelos Gogolides, Angeliki Tserepi, Nikos Vourdas, Maria Elena Vlachopoulou, Katerina Tsougeni, Dimitrios Kontziampasis
5:15 PM	183e		CMP Pad Surface Analysis and the Components of Pad Surface Texture Andrew S. Lawing

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