Monday, November 17, 2008: 8:30 AM-11:00 AM
Franklin 8 (Marriott Philadelphia Downtown)

Electronics and Photonics (08e)

#56 - Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin (08E02)
Topics in Plasma Science and Thin Film Applications I - In Honor of Herbert H. Sawin
Chair:Jane P. Chang
CoChair:Sumit Agarwal
8:30 AMPast and Future of Modeling and Simulation for Plasma Processing
Demetre J. Economou
9:05 AMAtomistic Simulations of Feature Scale Etch Profile Evolution
David B. Graves, Joseph J. Vegh
9:40 AMOvercoming Patterning Challenges at the 32 Nm Nodes
Arpan Mahorowala
10:10 AMFrom the Sawin Lab to NASA: Uses of Very Long Vacuum Tubes
Brett A. Cruden
10:40 AMHighlights on Plasma-Surface Interactions Honoring the Distinguished Career of Herbert H. Sawin
Jane P. Chang

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