| Monday, November 17, 2008: 8:30 AM-11:00 AM | |||
| Franklin 8 (Marriott Philadelphia Downtown) | |||
Electronics and Photonics (08e) | |||
| #56 - Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin (08E02) | |||
| Topics in Plasma Science and Thin Film Applications I - In Honor of Herbert H. Sawin | |||
| Chair: | Jane P. Chang | ||
| CoChair: | Sumit Agarwal | ||
| 8:30 AM | 56a | Past and Future of Modeling and Simulation for Plasma Processing Demetre J. Economou | |
| 9:05 AM | 56b | Atomistic Simulations of Feature Scale Etch Profile Evolution David B. Graves, Joseph J. Vegh | |
| 9:40 AM | 56c | Overcoming Patterning Challenges at the 32 Nm Nodes Arpan Mahorowala | |
| 10:10 AM | 56d | From the Sawin Lab to NASA: Uses of Very Long Vacuum Tubes Brett A. Cruden | |
| 10:40 AM | 56e | Highlights on Plasma-Surface Interactions – Honoring the Distinguished Career of Herbert H. Sawin Jane P. Chang | |
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