- 10:40 AM
56e

Highlights on Plasma-Surface Interactions Honoring the Distinguished Career of Herbert H. Sawin

Jane P. Chang, Department of Chemical and Biomolecular Engineering, University of California at Los Angeles, Los Angeles, CA 90095

This presentation will highlight the advances in understanding plasma-surface interactions, to honor the many contributions by Professor Herbert Sawin in plasma science, as he retires from Massachusetts Institute of Technology. It will feature tributes from industrial and academic leaders in the field, including the early days of plasma science, the experimental and theoretical advances in the last few decades, and its application beyond silicon processing and information technology.