In recent years, instead of the chlorofluorocarbon specified as the ozone-depleting substance, a chlorinated organic compound, hydrocarbon, alcohol, etc. are used as an alternative washing solvent, and they are used as a mixed solvent in many cases. Therefore, adsorption operation of binary systems is needed. Furthermore, since azeotropic may happen, in the case of the design of a solvent recovery system and operation, those adsorption equilibrium are required as basic data. This study considered the adsorption equilibrium relation used as basic data required in order to adsorb various binary mixture solvent vapor by high silica zeolite (HSZ).

The adsorbate used were ethanol and trichloroethylene which are the system of azeotropic mixture. The Experiments were carried out using a flow method, changing the total concentration of ethanol and trichloroethylene and composition. By this system, one azeotropic point appeared and three kinds of breakthrough curves were obtained by the difference in composition.

Moreover, it experimented by the gravimetric method. The adsorbate used were ethanol and trichloroethylene. In the gravimetric method, the adsorption isotherm of binary systems was obtained. The result of the single element experiment was able to reproduce the result of the flow method. As for the adsorption isotherm of binary systems, azeotropic phenomenon was not seen in the low concentration (3000 ppm , 6000 ppm ). However, the high concentration region that was not able to be measured by the flow method was able to be measured.