Plasma-Surface Interactions and the Control of Nanostructure
David B. Graves, UC Berkeley, Department of Chemical Engineering, Berkeley, CA 94720
Low temperature, nonequilibrium ionized gas plasmas are powerful tools for creating nanostructures on surfaces, especially over large areas. However, plasma-surface interactions are notoriously complex with many species interacting synergistically over disparate length and time scales. In this talk, I will review some of the opportunities and challenges in creating and controlling surface nanostructures with plasmas, with a focus on selected topics including nano-scale features in plasma etch and the challenges of using organic polymer masks for etching.