Monday, November 13, 2006: 12:30 PM-3:00 PM
Union Square 5 & 6 (Hilton San Francisco)
#92 - Process Monitoring and Fault Detection I (10B08)
Developments in process monitoring and fault detection.
Chair:S. Joe Qin
CoChair:Leo H. Chiang
12:30 PM92aProcess Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing
Jyh-Cheng Jeng, An-Jhih Su, Hsiao-Ping Huang, Cheng-Ching Yu
12:50 PM92bStatistical Fault Detection of Batch Processes in Semiconductor Manufacturing
Qinghua (Peter) He, Jin Wang
1:10 PM92cReal-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation
Rentian Xiong, Martha Grover Gallivan
1:30 PM92dIndustrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging)
Leo H. Chiang, Lloyd Colegrove
1:50 PM92eEvolving Models and a Pls Similarity Factor for Monitoring Batch Processes
Jon C. Gunther, Dale E. Seborg
2:10 PM92fBio-Reactor Monitoring with Multiway-Pca and Model Based-Pca
Yang Zhang, Thomas F. Edgar
2:30 PM92gVariance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes
Jie Yu, S. Joe Qin

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