Monday, November 13, 2006: 12:30 PM-3:00 PM | |||
Union Square 5 & 6 (Hilton San Francisco) | |||
#92 - Process Monitoring and Fault Detection I (10B08) | |||
Developments in process monitoring and fault detection. | |||
Chair: | S. Joe Qin | ||
CoChair: | Leo H. Chiang | ||
12:30 PM | 92a | Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing Jyh-Cheng Jeng, An-Jhih Su, Hsiao-Ping Huang, Cheng-Ching Yu | |
12:50 PM | 92b | Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing Qinghua (Peter) He, Jin Wang | |
1:10 PM | 92c | Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation Rentian Xiong, Martha Grover Gallivan | |
1:30 PM | 92d | Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging) Leo H. Chiang, Lloyd Colegrove | |
1:50 PM | 92e | Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes Jon C. Gunther, Dale E. Seborg | |
2:10 PM | 92f | Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca Yang Zhang, Thomas F. Edgar | |
2:30 PM | 92g | Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes Jie Yu, S. Joe Qin |
See more of Computing and Systems Technology Division
See more of The 2006 Annual Meeting