Friday, November 17, 2006: 3:15 PM-5:45 PM
Continental 4 (Hilton San Francisco)
#698 - Simulation and Control of Electronic Materials Manufacturing Processes (10D03)
The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes.
Chair:Andrew Salinger
CoChair:Ray Adomaitis
3:15 PM698aOn State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model
Jin Wang, Qinghua (Peter) He
3:40 PM698bModeling and Control of the Gradient Freeze Method of Crystal Growth
Lisa Lun, Andrew Yeckel, Prodromos Daoutidis, Jeffrey J. Derby
4:05 PM698cCombining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems
Theodora C. Xenidou, Andreas G. Boudouvis, Nicolas C. Markatos
4:30 PM698dSystem Identification and Model Predictive Control of Microstructure during Thin-Film Growth
Amit Varshney, Antonios Armaou
4:55 PM698eBuilding Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
Nirmal Tatavalli Mittadar, Michael Nikolaou, Demetre J. Economou
5:20 PM698fEffects of Temperature and Structural Defects on the Theoretical Strength of
Hadrian Djohari, Frederick Milstein, Dimitrios Maroudas

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