Thursday, November 16, 2006: 3:15 PM-5:45 PM
Yerba Buena Ballroom 2 (Marriott San Francisco)
#613 - Transport Phenomena in Electronic Materials Processing (08E03)
This has been a well attended core session of area 8e for a number of years. It provides an opportunity for those interested in electronic materials to interact with experts in transport. This fits with the proposed topical conference in microelectronics. This session treats all aspects of the transport of mass, momentum and energy in electronic materials processing. Both computational and experimental papers are solicited.
Chair:Talid R. Sinno
CoChair:W. Robert Ashurst
3:15 PM613aMulti-Scale Simulation of Quantum Dot Formation in Metal Thin-Film Epitaxy
Yogesh Tiwary, Kristen A. Fichthorn
3:40 PM613bMultiscale Modeling and Neural-Network Based Optimization of a Thin Film Deposition Process
Cihan Oguz, Martha Gallivan
4:05 PM613cAnalysis of Electromigration-Driven Interactions between Voids in Metallic Thin Films
Jaeseol Cho, M. Rauf Gungor, Dimitrios Maroudas
4:30 PM613dEffect of Rotational Speed and Marangoni Stresses on Local Flow Structure in Silicon Melt of Czochralski Crystal Growth Process
Prashant Ramchandra Gunjal, Milind S. Kulkarni, P. A. Ramachandran
4:55 PM613eDefect Engineering by Short-Annealing-Time Methods for Ultrashallow Junction Formation
Charlotte Kwok, Ramakrishnan Vaidyanathan, Edmund G. Seebauer
5:20 PM613fA Comprehensive Model for Coupled Oxide Precipitation and Point Defect Aggregation in Crystalline Silicon
Vijay Kumar Gupta, Talid R. Sinno

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