We use standard microfabrication techniques to create each of the components and test individual performance. Integration of the fabricated parts will not be demonstrated. A MEMS pump with a fluctuating polyimide membrane is fabricated to form the continuous sampling component of the GC. Preconcentration principle is demonstrated in a microfluidic processor with valves using metal-organic framework molecules as the adsorbing species. Micro-columns are fabricated in silicon using DRIE technique. Micro-columns are coated with modified polydimethylsiloxane films to perform the gas phase separation. High speed separation on chromatography has been targeted to build a highly sensitive and specific sensor. High resolution columns are fabricated after studying effects of 1) various micro-channel bend geometries and 2) micro-channel configurations on chip. The detector side effort is focused on building a carbon nanotube based chemi-sensors. Carbon nanotubes are highly promising materials for sensing chemical species like thionyl chloride and dimethylmethylphosphonate, a simulant for chemical warfare agent sarin. Results of individual operational components are evaluated using an ordinary modified GC.