Wednesday, 2 November 2005: 12:30 PM-3:00 PM
Pavilion B (Millennium Hotel)

Electronics and Photonics (08e)

#380 - Thin Film Processing (08E02)
This session covers various aspects of thin film processing relevant to microelectronics and other applications.
CoChair:Edward A. Evans
Chair:Brett A. Cruden
12:30 PMMultiscale Model for Plasma Enhanced Deposition on Nanostructures
Edward A. Evans, Kevin Kreider, Guanghai Zhang, Jerry Young, Curt Clemons, Alper Buldum
12:48 PMMolecular Vapor Deposition for Enhanced Monolayer Stability and Durability
B. Kobrin, W. Robert Ashurst, V. Fuentes, R. Nowak, R. Yi, Jeff Chinn
1:06 PMInterface Formation and Energy Level Alignment of Pentacene on GaN
John J. Uhlrich, Thomas F. Kuech
1:24 PMFilm Deposition on Electrostatically Suspended Nanowires by Pecvd in Dusty Plasma Reactor
Themis Matsoukas, Jin Cao
1:42 PMIon-Enhanced Plasma Etching of Metal Oxides in Chlorine Based Plasmas
Ryan M. Martin, Hans-Olof Blom, Jane P. Chang
2:00 PMElectron-Beam Hardening of Functionalized Polynorbornene Thin Films
Sue Ann Bidstrup Allen, Seongho Park, Paul A. Kohl
2:18 PMRemote Oxygen Plasma Growth of Mgo Films on Sic for Functional Oxide Integration
Trevor L. Goodrich, Zhuhua Cai, Katherine S. Ziemer
Sponsor:Materials Engineering and Sciences Division

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