| Wednesday, 2 November 2005: 12:30 PM-3:00 PM | |||
| Pavilion B (Millennium Hotel) | |||
Electronics and Photonics (08e) | |||
| #380 - Thin Film Processing (08E02) | |||
| This session covers various aspects of thin film processing relevant to microelectronics and other applications. | |||
| CoChair: | Edward A. Evans | ||
| Chair: | Brett A. Cruden | ||
| 12:30 PM | 380a | Multiscale Model for Plasma Enhanced Deposition on Nanostructures Edward A. Evans, Kevin Kreider, Guanghai Zhang, Jerry Young, Curt Clemons, Alper Buldum | |
| 12:48 PM | 380b | Molecular Vapor Deposition for Enhanced Monolayer Stability and Durability B. Kobrin, W. Robert Ashurst, V. Fuentes, R. Nowak, R. Yi, Jeff Chinn | |
| 1:06 PM | 380c | Interface Formation and Energy Level Alignment of Pentacene on GaN John J. Uhlrich, Thomas F. Kuech | |
| 1:24 PM | 380d | Film Deposition on Electrostatically Suspended Nanowires by Pecvd in Dusty Plasma Reactor Themis Matsoukas, Jin Cao | |
| 1:42 PM | 380e | Ion-Enhanced Plasma Etching of Metal Oxides in Chlorine Based Plasmas Ryan M. Martin, Hans-Olof Blom, Jane P. Chang | |
| 2:00 PM | 380f | Electron-Beam Hardening of Functionalized Polynorbornene Thin Films Sue Ann Bidstrup Allen, Seongho Park, Paul A. Kohl | |
| 2:18 PM | 380g | Remote Oxygen Plasma Growth of Mgo Films on Sic for Functional Oxide Integration Trevor L. Goodrich, Zhuhua Cai, Katherine S. Ziemer | |
| Sponsor: | Materials Engineering and Sciences Division | ||
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