Tuesday, 1 November 2005: 12:30 PM-3:00 PM
301 (Cincinnati Convention Center)

Electronics and Photonics (08e)

#206 - Chemical Vapor Deposition I (08E01)
We invite papers that present recent advances in Chemical Vapor Deposition (CVD). Topics traditionally covered in this session include: CVD reactor diagnostics and modeling, scale-up issues, equipment development, novel deposition precursors, precursor delivery systems, sensors and process control, gas-phase and surface chemical reaction mechanisms, kinetics, chemically reacting flow simulations, nucleation and growth models. Applications to microelectronics, optoelectronics, thin-film coatings, synthesis of nanowires & nanotubes, and new-material development are welcome. Papers illustrating non-traditional applications of Chemical Engineering to CVD research, materials processing and advances in chemical engineering science through CVD research are especially encouraged.
CoChair:David S. Dandy
Chair:Daniel D. Burkey
Part 1 
12:30 PMWelcoming Remarks
Part 2 
12:35 PMPreparation of Hydrophobic Multilayers on Solid Surfaces
Anfeng Wang, Jeff Chinn, Xuemei Liang, Ting Cao, Haiying Tang, Steven O. Salley, Gregory W. Auner, K. Y. Simon Ng
12:55 PMin Situ Real-Time Diagnostics for Studying the Structural Evolution of Nanocrystalline Silicon Thin Films during Plasma Deposition
Radhika C. Mani, Eray S. Aydil
1:15 PMRoll-to-Roll Initiated Chemical Vapor Deposition (Icvd) of Functional, Flexible Nanomaterials
Malancha Gupta, Karen K. Gleason
1:35 PMOn-Line Apcvd of Sno2 Coatings on Glass
Mingheng Li, James W. McCamy
1:55 PMMetal Organic Chemical Vapor Deposition of Titanium Oxynitride Films Using Tetrakis(Diethylamino)Titanium
Xuemei Song, Christos G. Takoudis
2:15 PMChemical Vapor Deposition of Palladium Seed Layers
Gregory L. Griffin, Lidong Wang
2:35 PMDeposition of WnXCY Using Allylimido Complexes CL4(Rcn)W(Nc3H5): Effect of Nh3 on Film Properties
Hiral M. Ajmera, Tim Anderson, Laurel L. Reitfort, Lisa McElwee-White
Part 3 
2:55 PMConcluding Remarks
Sponsor:Materials Engineering and Sciences Division
Cosponsors:Engineering Sciences and Fundamentals

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