Molecular dynamics simulations are used to study the adhesion and friction between nanoconfined self-assembled monolayers (SAM) on silica, representing a typical coating for silicon-based nanoelectromechanical devices (NEMS). The frictional behavior is investigated as a function of normal load, shear velocity, and chemical composition of the SAM coating. Effectiveness of imidazolium based ionic liquids to act as lubricants and reduce the friction in NEMS devices is also investigated.

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