Session: #552 - Particles in Semiconductor Processing (08E08)


Thursday, November 8, 2007: 8:30 AM-11:00 AM
Room 254 B (Salt Palace Convention Center)
Electronics and Photonics (08e)
#552 - Particles in Semiconductor Processing (08E08)
Particles, and especially nanoparticles, play many roles in the processing of semiconductors for electronic and photonic applications. Unintentionally generated particles are sources of contamination and yield loss in conventional processing. Slurries for chemical mechanical polishing (CMP) contain abrasive nanoparticles of a variety of materials. Semiconductor nanoparticles or 'quantum dots' are envisioned by many as active components of future electronic and photonic devices. This session is intended to include studies of particle formation, or or the prevention thereof, and particle behavior in any or all of these roles. Both experimental and theoretical or modeling studies are welcome.
Chair:	Stephen P. Beaudoin
CoChair:	Mark Swihart
8:30 AM	552a	First-Principles Theoretical Analysis Of The Structure And Stability Of Ii-Vi Semiconductor Nanoclusters Tejinder Singh, T. J. Mountziaris, Dimitrios Maroudas
8:50 AM	552b	Computational Modeling Of Silicon Nanoparticle Formation Hongyi Dang, Mark T. Swihart
9:10 AM	552c	Quantum Wire Arrays in the Framework of ETS-4 and ETS-10 Onnaz Ozkanat, Jiangdong Deng, Al Sacco Jr.
9:30 AM	552d	Particle Adhesion to Photomask Materials Caitlin Kilroy, Gautam Kumar, Ravi Jaiswal, Stephen Beaudoin

Electronics and Photonics (08e)