Wednesday, November 7, 2007: 3:30 PM-6:00 PM
Room 251 B (Salt Palace Convention Center)

Electronics and Photonics (08e)

#463 - Chemical Vapor Deposition I (08E00)
We invite papers that present recent advances in Chemical Vapor Deposition (CVD). Topics traditionally covered in this session include: CVD reactor diagnostics and modeling, scale-up issues, equipment development, novel deposition precursors, precursor delivery systems, sensors and process control, gas-phase and surface chemical reaction mechanisms, kinetics, chemically reacting flow simulations, nucleation and growth models. Applications to microelectronics, optoelectronics, thin-film coatings, synthesis of nanowires & nanotubes, and new-material development are welcome. Papers illustrating non-traditional applications of Chemical Engineering to CVD research, materials processing and advances in chemical engineering science through CVD research are especially encouraged.
Chair:Daniel D. Burkey
CoChair:Kenneth Lau
3:30 PMAtmospheric Plasma Deposition Of Silicon Dioxide Coatings For Mechanical And Electrical Protection
Angela M. Ladwig, Steve Babayan, Mark Smith, Mike Hester, Wayne Highland, Ronald Koch, Robert F. Hicks
3:50 PMFluidized Bubbling Bed Reactor Model For Silane Pyrolysis In Solar Grade Silicon Production
Yue Huang, Palghat A. Ramachandran, Milorad P. Dudukovic
4:10 PMEffects Of Microstructure And Elemental Composition On Material Properties Of Lpcvd Sic Films For Micro- And Nanosystems
Christopher S. Roper, Roger T. Howe, Roya Maboudian
4:30 PMGrowth And Characterization Of Ill-V Compound Semiconductors On Silicon
S. F. Cheng, R. L. Woo, Li Gao, R. F. Hicks
4:50 PMChemical Vapor Deposition Growth And The Evolution Of The Microstructure Of Indium Arsenide On Gallium Arsenide
Thomas F. Kuech, Anish Khandekar, Xueyan Song, Susan Babcock, Manish Rathi, Ganasen Suryanarayanan
5:10 PMThe Chemical Vapor Deposition Growth of Gallium Arsenide-Based Quantum Well ‘W' Structures for Mid-IR
Thomas F. Kuech, Manish Rathi, Anish A. Khandekar, D.P. Xu, J. Y. T. Huang, J.H. Park, Luke J. Mawst, Xueyan Song, S.E. Babcock

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