Preliminary Program subject to change
01C17 Interfacial Phenomena in Microfluidics, Mems, and Semiconductor Processing
OverviewThis symposium will focus on interfacial, electrochemical, and transport issues that are critical to the understanding and development of microfluidic devices, micro-electro-mechanical systems (MEMS), and semi-conductor processing. Both theoretical and experimental studies are encouraged.
Primary SponsorInterfacial Phenomena (01c)

Chair

Sammy S. Datwani
Staff Engineer/Program Manager
Labcyte, Inc
1190 Borregas Avenue
Sunnyvale, CA 94089
Phone Number: 408-7472000 x 207
Fax Number: 408-747-2010
Email: sammy.datwani@labcyte.com

CoChair

Carlton F. Brooks
Sandia National Laboratories
P.O.Box 5800
Albuquerque, NM 87185
Phone Number: 505-284-2454
Email: cfbrook@sandia.gov

CoChair

Noshir S. Pesika
Postdoctoral Associate
Chemical Engineering
University of California
Interfacial Science Lab
Engineering II, Room 3357
Santa Barbara, CA 93106
Phone Number: 805-893-8806
Email: noshir@engineering.ucsb.edu
Mems Sensors With Chemically Selective Coatings Of Ionic Liquids
Eunhyea Chung1, Nickolay Lavrik2, Panos Datskos2, Joanna McFarlane2, Sheng Dai2 and Costas Tsouris2, (1)School of Civil and Environmental Engineering, Georgia Institute of Technology, 200 Bobby Dodd Way, Atlanta, GA 30332-0373, (2)Oak Ridge National Laboratory, P.O. Box 2008, Oak Ridge, TN 37831-6181
Microchannel Gas-Liquid Interface As Hydrogen Fuel Cell And Sensor
Ilwhan Oh, Department of Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign, 294 RAL, MC-712, 600 S. Mathews Ave., Urbana, IL 61801, Mark A. Shannon, Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, 294 RAL, MC-712, 600 S. Mathews Ave., Urbana, IL 61801 and Rich I. Masel, Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign, 294 RAL, MC-712, 600 S. Mathews Ave., Urbana, IL 61801
Relating Interfacial Vapor Void Phenomena And Fluid Actuation In Hydrophobic Microfluidic Devices Using Electrokinetic And Atomic Force Microscopy Characterization
Vishal Tandon, Biomedical Engineering, Cornell University, 245 Upson Hall, Ithaca, NY 14853, Sharath Bhagavatula, Electrical Engineering, Cornell University, 245 Upson Hall, Ithaca, NY 14853, Aditya Sharma, Applied Physics, Cornell University, 245 Upson Hall, Ithaca, NY 14853 and Brian J. Kirby, Sibley School of Mechanical & Aerospace Engineering, Cornell University, Ithaca, NY 14853
Aging of Self-Assembled Monolayers for Anti-Stiction Coatings Studied by near Edge X-Ray Absorption Fine Structure
Robert J. Klein1, Daniel Fischer2 and Joseph L. Lenhart1, (1)Organic Materials, Sandia National Laboratories, P.O. Box 5800, MS-1411, Albuquerque, NM 87122, (2)National Institute of Standards and Technology, Brookhaven National Laboratories, Upton, NY 11973
Impact Of Magnesium Oxide Interlayer On Heteroepitaxial Growth Of Barium Ferrite On Wide Bandgap Semiconductor 6H-Sic
Zhuhua Cai1, Trevor L. Goodrich1, Zhaohui Chen2, Vince Harris2 and Katherine S. Ziemer1, (1)Chemical Engineering, Northeastern University, 360 Huntington Avenue, 148 Egan Research Center, Boston, MA 02115, (2)Department of Electrical and Computer Engineering, Northeastern University, 360 Huntington Ave, Boston, MA 02115
Hybrid Inorganic-Organic Microparticles for Chemical Mechanical Polishing
Cecil Coutinho1, Subrahmanya Mudhivarthi2, Ashok Kumar2 and Vinay K. Gupta1, (1)Chemical Engineering, University of South Florida, 4202 E Fowler Avenue, ENB 118, Tampa, FL 33620, (2)Mechanical Engineering, University of South Florida, 4202 E Fowler Avenue, ENB 118, Tampa, FL 33620
Electrochemical Impedance Studies Of Copper Surface Reactions During Chemical Mechanical Planarization
Bum Soo Kim, Chemical Engineering, Purdue University, Forney Hall of Chemical Engineering, B134D, 480 Stadium Mall Drive, West Lafayette, IN 47907 and Stephen P. Beaudoin, Chemical Engineering, Purdue University, Forney Hall of Chemical Engineering, 480 Stadium Mall Drive, West Lafayette, IN 47907

Engineering Sciences and Fundamentals