Preliminary Program subject to change
01F05 Thin Films, Coatings and Interfacial Phenomena Using near and Supercritical Fluids
OverviewWe solicit work related to manufacture, processing, or characterization.
Primary SponsorHigh Pressure (01f)

Chair

M.P. Srinivasan
Department of Chemical and Biomolecular Engineering
National University of Singapore
4 Engineering Drive 4
Block E5
Singapore,
Singapore
Phone Number: (65) 6516 2171
Fax Number: (65) 6779 1936
Email: chesmp@nus.edu.sg

CoChair

Christopher L. Kitchens
Assistant Professor
Department of Chemical and Biomolecular Engineering
Clemson University
127 Earle Hall
Clemson, SC 29634-0909
Phone Number: 864-656-5419
Email: ckitche@clemson.edu
In-Situ Ftir Analysis Of Porous Low-K Film Repair
Eduardo Vyhmeister1, David Suleiman1, L. Antonio Estévez1 and Anthony J. Muscat2, (1)Department of Chemical Engineering, University of Puerto Rico, P.O. Box 9046, Mayaguez, PR 00681-9046, (2)Chemical and Environmental Engineering, University of Arizona, P.O. Box 210011, Tucson, AZ 85721
Investigating The Effect Of Gold Nanoparticle Deposition Via CO2-Expanded Liquids On Micromachine Reliability
Kendall M. Hurst, W. Robert Ashurst and Christopher B. Roberts, Department of Chemical Engineering, Auburn University, 212 Ross Hall, Auburn University, Auburn, AL 36849
Deposition Of Conformal Metal Oxide Films In Supercritical Carbon Dioxide
Eunyoung You1, Adam O'Neil2 and James J. Watkins2, (1)Department of Chemical Engineering, University of Massachusetts, 686 N. Pleasant St., Amherst, MA 01003, (2)Department of Polymer Science and Engineering, University of Massachusetts, 120 Governors Dr., Amherst, MA 01003
Nanostructured Ultrathin Films Formed By Covalent Molecular Assembly In Supercritical Carbon Dioxide
Sreenivasa Reddy Puniredd, Department of Chemical and Biomolecular Engineering, National University of Singapore, 4 Engineering Drive 4, Block E5, Singapore, Singapore and M. P. Srinivasan, Chemical and Biomolecular Engineering, National University of Singapore, 4 Engineering Drive 4, Singapore, Singapore

Engineering Sciences and Fundamentals